Functionalization of CNFET arrays for chemical sensing

Abstract

Practical deployment of gas sensors for general-purpose applications requires integrated chips that operate at room temperature. However, real-world implementation has been limited by challenges such as the integration of highly sensitive and selective sensors, as well as insufficient statistical validation. In this work, we present an integrated gas sensor array comprising 2048 carbon nanotube field-effect transistors (CNFETs), functionalized with conductive metal-organic frameworks (cMOFs) and metal nanoparticles. Our functionalization approach enhances sensor responses by up to two orders of magnitude and enables on-chip pattern generation. Furthermore, the large number of redundant sensors allows for statistically significant measurements. The improved sensitivity is attributed to increased Schottky barrier modulation. We also demonstrate the chip’s capability to classify bacteria and yeast based on the gas mixtures emitted from cultures grown on agar plates. This work highlights the potential of integrated gas sensors as a practical, rapid, and cost-effective approach for general gas sensing applications, including biomedical applications.