Fabrication of Superconducting Reflectionless Filters for Quantum Microwave Circuits

Abstract

The performance and scalability of superconducting quantum circuits depends critically on the microwave environment. Minimizing signal reflections and suppressing thermal noise are essential for achieving high-fidelity readout and preserving qubit coherence. A significant challenge arises from the use of conventional cryogenic components such as isolators and circulators, which exhibit nonideal out-of-band reflection characteristics. Reflections degrade impedance matching and limit the performance of broadband quantum limited amplifiers. Superconducting implementations of reflectionless microwave filters offer a promising solution to mitigate these issues. The focus of this work is the fabrication and cryogenic characterization of reflectionless filters compatible with superconducting qubit fabrication flows. Devices were implemented on high resistivity silicon substrates using aluminum ground planes, integrated nichrome resistors, and crossovers formed with SiO2 interlayer dielectric. Cryogenic measurements at 20 mK demonstrate high return loss, confirming the viability of these filters for co-fabrication with traveling-wave parametric amplifiers (TWPAs) and circuit quantum electrodynamics (cQED) architectures. The filters exhibit low insertion loss in the passband to maintain quantum measurement efficiency and provide broadband reflection suppression across frequencies relevant to superconducting qubits, offering a scalable way to manage microwave noise in superconducting quantum processors.