Innovation in Manufacturing Systems and Technology (IMST): Recent submissions
Now showing items 82-84 of 108
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Characterization and Modeling of Chemical-Mechanical Polishing for Polysilicon Microstructures
(2004-01)Long the dominant method of wafer planarization in the integrated circuit (IC) industry, chemical-mechanical polishing is starting to play an important role in microelectromechnical systems (MEMS). We present an experiment ... -
Building a Document Corpus for Manufacturing Knowledge Retrieval
(2004-01)When faced with challenging technical problems, R&D personnel would often turn to technical papers to seek inspiration for a solution. The building of a corpus of such papers and the easy retrieval of relevant papers by ... -
An Analytical Solution on Convective and Diffusive Transport of Analyte in Laminar Flow of Microfluidic Slit
(2004-01)Microfluidic devices could find applications in many areas, such as BioMEMs, miniature fuel cells and microfluidic cooling of electronic circuitry. One of the important considerations of microfluidic device in analytical ...
