Scheduling of Batch Processors in Semiconductor Manufacturing – A Review

dc.contributor.author	Mathirajan, M.
dc.contributor.author	Appa Iyer, Sivakumar
dc.date.accessioned	2003-11-29T20:51:29Z
dc.date.available	2003-11-29T20:51:29Z
dc.date.issued	2003-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3755
dc.description.abstract	In this paper a review on scheduling of batch processors (SBP) in semiconductor manufacturing (SM) is presented. It classifies SBP in SM into 12 groups. The suggested classification scheme organizes the SBP in SM literature, summarizes the current research results for different problem types. The classification results are presented based on various distributions and various methodologies applied for SBP in SM are briefly highlighted. A comprehensive list of references is presented. It is hoped that, this review will provide a source for other researchers/readers interested in SBP in SM research and help simulate further interest.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	362263 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Innovation in Manufacturing Systems and Technology (IMST);
dc.subject	scheduling	en
dc.subject	batch processor	en
dc.subject	semiconductor manufacturing system	en
dc.subject	review	en
dc.subject	classification	en
dc.title	Scheduling of Batch Processors in Semiconductor Manufacturing – A Review	en
dc.type	Article	en