| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Hawryluk, Andrew M. | en_US |
| dc.contributor.author | Melngailis, John J. | en_US |
| dc.contributor.author | Schatterbug, Mark L. | en_US |
| dc.contributor.author | Ceglio, Natale M., Jr. | en_US |
| dc.contributor.author | Price, R. H. | en_US |
| dc.contributor.author | Tsumita, Norikazu | en_US |
| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Horwitz, Christopher M. | en_US |
| dc.contributor.author | Dana, Stephane S. | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Bezjian, Krikor | en_US |
| dc.contributor.author | Keavney, Christopher J. | en_US |
| dc.contributor.author | Fonstad, Clifton G. | en_US |
| dc.contributor.author | Markunas, Robert J. | en_US |
| dc.contributor.author | Haus, Hermann A. | en_US |
| dc.contributor.author | Islam, Muhammed N. | en_US |
| dc.contributor.author | Garber, Edward M. | en_US |
| dc.contributor.author | Warren, Alan C. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Kwasnick, Robert F. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.date.accessioned | 2010-07-15T21:29:41Z | |
| dc.date.available | 2010-07-15T21:29:41Z | |
| dc.date.issued | 1982-01 | en_US |
| dc.identifier | RLE_PR_124_17 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56844 | |
| dc.description | Contains reports on twelve research projects. | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Subcontract 2069209) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-C-0104) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-80-C-0104) | en_US |
| dc.description.sponsorship | Harkness Foundation | en_US |
| dc.description.sponsorship | I.B.M. | en_US |
| dc.description.sponsorship | U.S. Department of Energy (Contract DE-ACO2-80-E10179) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS80-17705) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1982 | en_US |
| dc.relation.ispartof | Submicron Structures Fabrication and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 124 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Fabrication and Research | en_US |
| dc.subject.other | Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy | en_US |
| dc.subject.other | Spatial-Period-Division | en_US |
| dc.subject.other | Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques | en_US |
| dc.subject.other | Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄ | en_US |
| dc.subject.other | Graphoepitaxy by CVD | en_US |
| dc.subject.other | Solution Growth | en_US |
| dc.subject.other | Graphoepitaxy for Solar Cells | en_US |
| dc.subject.other | Liquid Phase Epitaxy of InP | en_US |
| dc.subject.other | Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes | en_US |
| dc.subject.other | Fabrication of Corrugated-Gate MOS Structures | en_US |
| dc.subject.other | Narrow Inversion Layers in Silicon | en_US |
| dc.subject.other | Collaborative Projects | en_US |
| dc.title | Submicron Structures Fabrication and Research | en_US |
| dc.type | Technical Report | en_US |
