| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Hawryluk, Andrew M. | en_US |
| dc.contributor.author | Plotnik, Irving | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Kwasnick, Robert F. | en_US |
| dc.contributor.author | Licini, Jerome C. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Lee, Patrick A. | en_US |
| dc.contributor.author | Warren, Alan C. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Chou, Stephen Y. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Yonehara, Takao | en_US |
| dc.contributor.author | Wong, Chee C. | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Ceglio, Natale M., Jr. | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.contributor.author | Stein, Josephine A. | en_US |
| dc.contributor.author | Summa, Deborah A. | en_US |
| dc.contributor.author | Rajchman, Jan A. | en_US |
| dc.contributor.author | Paynter, Henry M. | en_US |
| dc.contributor.author | Chen, Dong-Pei | en_US |
| dc.contributor.author | Islam, Mohammed | en_US |
| dc.contributor.author | Haus, Hermann A. | en_US |
| dc.date.accessioned | 2010-07-15T21:48:19Z | |
| dc.date.available | 2010-07-15T21:48:19Z | |
| dc.date.issued | 1984-01 | en_US |
| dc.identifier | RLE_PR_126_17 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56894 | |
| dc.description | Contains reports on thirteen research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-83-K-0003) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | National Science Foundation (Contract ECS82-05701) | en_US |
| dc.description.sponsorship | U.S. Department of Energy (Contract DE-ACO2-82-ER-13019) | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Contract 2069209) | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Contract NGL-22-009-638) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS80-17705) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ENG79-09980) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1984 | en_US |
| dc.relation.ispartof | Submicron Structures Technology and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 126 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Technology | en_US |
| dc.subject.other | Submicron Structures Research | en_US |
| dc.subject.other | Submicron Structures Laboratory | en_US |
| dc.subject.other | Microfabrication at Linewidths of 0.1 μm and Below | en_US |
| dc.subject.other | Electronic Conduction in Ultra-Narrow Silicon Inversion Layers | en_US |
| dc.subject.other | Corrugated Gate MOS Structures | en_US |
| dc.subject.other | Submicron FET's in Si | en_US |
| dc.subject.other | Graphoepitaxy of Si | en_US |
| dc.subject.other | Graphoepitaxy of Ge | en_US |
| dc.subject.other | Graphoepitaxy of Model Materials | en_US |
| dc.subject.other | Zone-Melting Recrystallization of Si for Solar Cells | en_US |
| dc.subject.other | Zone-Melting Recrystallization of IIl-V Materials | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings | en_US |
| dc.subject.other | Zone Plates for X-Ray Spectroscopy and Microscopy | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy | en_US |
| dc.subject.other | Switchable Zero-Order Diffraction Gratings as Light Valves | en_US |
| dc.subject.other | Surface Acoustic Wave Propagation in Gratings | en_US |
| dc.subject.other | Collaborative Projects | en_US |
| dc.title | Submicron Structures Technology and Research | en_US |
| dc.type | Technical Report | en_US |
