| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Plotnik, Irving | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Kwasnick, Robert F. | en_US |
| dc.contributor.author | Licini, Jerome C. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Lee, Patrick A. | en_US |
| dc.contributor.author | Warren, Alan C. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Chou, Stephen Y. | en_US |
| dc.contributor.author | Shahidi, Ghavam G. | en_US |
| dc.contributor.author | Ippen, Erich P. | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Wong, Chee C. | en_US |
| dc.contributor.author | Yonehara, Takao | en_US |
| dc.contributor.author | Garrison, Stephen M. | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Schott, Stephen C. | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.contributor.author | Stein, Josephine A. | en_US |
| dc.contributor.author | Summa, Deborah A. | en_US |
| dc.contributor.author | Rajchman, Jan A. | en_US |
| dc.contributor.author | Paynter, Henry M. | en_US |
| dc.contributor.author | Chen, Dong-Pei | en_US |
| dc.contributor.author | Haus, Hermann A. | en_US |
| dc.date.accessioned | 2010-07-15T21:57:09Z | |
| dc.date.available | 2010-07-15T21:57:09Z | |
| dc.date.issued | 1985-01 | en_US |
| dc.identifier | RLE_PR_127_01 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56933 | |
| dc.description | Contains reports on fourteen research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-83-K-0003) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS82-05701) | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation (Grant 83-01-033) | en_US |
| dc.description.sponsorship | U.S. Department of Energy (Contract DE-ACO2-82-ER-13019) | en_US |
| dc.description.sponsorship | Lawrence Livermore National Laboratory (Contract 2069209) | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Contract NAS5-27591) | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS80-17705) | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Contract NGL22-009-638) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 | en_US |
| dc.relation.ispartof | Submicron Structures Technology and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Technology | en_US |
| dc.subject.other | Submicron Structures Research | en_US |
| dc.subject.other | Submicron Structures Laboratory | en_US |
| dc.subject.other | Microfabrication at Linewidths of 0.1 μm and Below | en_US |
| dc.subject.other | Electronic Conduction in Ultra-Narrow Silicon Inversion Layers | en_US |
| dc.subject.other | Corrugated Gate MOS Structures | en_US |
| dc.subject.other | Submicron FET's in Si | en_US |
| dc.subject.other | Submicron-Gap High-Mobility Silicon Picosecond Photodetectors | en_US |
| dc.subject.other | Graphoepitaxy of Si | en_US |
| dc.subject.other | Graphoepitaxy of Ge | en_US |
| dc.subject.other | Graphoepitaxy of Model Materials | en_US |
| dc.subject.other | Zone-Melting Recrystallization of Si for Solar Cells | en_US |
| dc.subject.other | Integration of Si and Ill-V Materials | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy | en_US |
| dc.subject.other | Display Based on Switchable Zero Order Diffraction Grating Light Valves | en_US |
| dc.subject.other | Surface Acoustic Wave Propagation in Gratings | en_US |
| dc.subject.other | Near IR Grating Polarizers | en_US |
| dc.title | Submicron Structures Technology and Research | en_US |
| dc.type | Technical Report | en_US |
