Show simple item record

dc.contributor.authorAnderson, Erik H.en_US
dc.contributor.authorPlotnik, Irvingen_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorMelngailis, Johnen_US
dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorKwasnick, Robert F.en_US
dc.contributor.authorLicini, Jerome C.en_US
dc.contributor.authorKastner, Marc A.en_US
dc.contributor.authorLee, Patrick A.en_US
dc.contributor.authorWarren, Alan C.en_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorChou, Stephen Y.en_US
dc.contributor.authorShahidi, Ghavam G.en_US
dc.contributor.authorIppen, Erich P.en_US
dc.contributor.authorPalmer, Joyce E.en_US
dc.contributor.authorWong, Chee C.en_US
dc.contributor.authorYonehara, Takaoen_US
dc.contributor.authorGarrison, Stephen M.en_US
dc.contributor.authorAtwater, Harry A.en_US
dc.contributor.authorThompson, Carl V.en_US
dc.contributor.authorSchott, Stephen C.en_US
dc.contributor.authorCanizares, Claude R.en_US
dc.contributor.authorStein, Josephine A.en_US
dc.contributor.authorSumma, Deborah A.en_US
dc.contributor.authorRajchman, Jan A.en_US
dc.contributor.authorPaynter, Henry M.en_US
dc.contributor.authorChen, Dong-Peien_US
dc.contributor.authorHaus, Hermann A.en_US
dc.date.accessioned2010-07-15T21:57:09Z
dc.date.available2010-07-15T21:57:09Z
dc.date.issued1985-01en_US
dc.identifierRLE_PR_127_01en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/56933
dc.descriptionContains reports on fourteen research projects.en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAG29-83-K-0003)en_US
dc.description.sponsorshipU.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS82-05701)en_US
dc.description.sponsorshipSemiconductor Research Corporation (Grant 83-01-033)en_US
dc.description.sponsorshipU.S. Department of Energy (Contract DE-ACO2-82-ER-13019)en_US
dc.description.sponsorshipLawrence Livermore National Laboratory (Contract 2069209)en_US
dc.description.sponsorshipNational Aeronautics and Space Administration (Contract NAS5-27591)en_US
dc.description.sponsorshipDefense Advanced Research Projects Agency (Contract N00014-79-C-0908)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS80-17705)en_US
dc.description.sponsorshipNational Aeronautics and Space Administration (Contract NGL22-009-638)en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985en_US
dc.relation.ispartofSubmicron Structures Technology and Researchen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherSubmicron Structures Technologyen_US
dc.subject.otherSubmicron Structures Researchen_US
dc.subject.otherSubmicron Structures Laboratoryen_US
dc.subject.otherMicrofabrication at Linewidths of 0.1 μm and Belowen_US
dc.subject.otherElectronic Conduction in Ultra-Narrow Silicon Inversion Layersen_US
dc.subject.otherCorrugated Gate MOS Structuresen_US
dc.subject.otherSubmicron FET's in Sien_US
dc.subject.otherSubmicron-Gap High-Mobility Silicon Picosecond Photodetectorsen_US
dc.subject.otherGraphoepitaxy of Sien_US
dc.subject.otherGraphoepitaxy of Geen_US
dc.subject.otherGraphoepitaxy of Model Materialsen_US
dc.subject.otherZone-Melting Recrystallization of Si for Solar Cellsen_US
dc.subject.otherIntegration of Si and Ill-V Materialsen_US
dc.subject.otherSubmicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopyen_US
dc.subject.otherHigh-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopyen_US
dc.subject.otherDisplay Based on Switchable Zero Order Diffraction Grating Light Valvesen_US
dc.subject.otherSurface Acoustic Wave Propagation in Gratingsen_US
dc.subject.otherNear IR Grating Polarizersen_US
dc.titleSubmicron Structures Technology and Researchen_US
dc.typeTechnical Reporten_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record