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dc.contributor.authorAnderson, Erik H.en_US
dc.contributor.authorChu, Williamen_US
dc.contributor.authorPlotnik, Irvingen_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorYen, Anthony T.en_US
dc.contributor.authorWarren, Alan C.en_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorOrlando, Terry P.en_US
dc.contributor.authorMelngailis, Johnen_US
dc.contributor.authorChou, Stephen Y.en_US
dc.contributor.authorShahidi, Ghavam G.en_US
dc.contributor.authorLicini, Jerome C.en_US
dc.contributor.authorScott-Thomas, John H. F.en_US
dc.contributor.authorPark, Samuel L.en_US
dc.contributor.authorKastner, Marc A.en_US
dc.contributor.authorAtwater, Harry A.en_US
dc.contributor.authorGarrison, Stephen M.en_US
dc.contributor.authorPalmer, Joyce E.en_US
dc.contributor.authorQuek, Hui Mengen_US
dc.contributor.authorWong, Chee C.en_US
dc.contributor.authorThompson, Carl V.en_US
dc.contributor.authorCanizaares, Claude C.en_US
dc.contributor.authorStein, Josephine A.en_US
dc.contributor.authorSumma, Deborah A.en_US
dc.contributor.authorPaynter, Henry M.en_US
dc.contributor.authorRajchman, Jan A.en_US
dc.contributor.authorTse, Ming K.en_US
dc.date.accessioned2010-07-15T22:07:01Z
dc.date.available2010-07-15T22:07:01Z
dc.date.issued1986-01en_US
dc.identifierRLE_PR_128_01en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/56948
dc.descriptionContains reports on ten research projects.en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAG29-83-K-0003)en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAL03-86-K-0002)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS82-05701)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS85-06565)en_US
dc.description.sponsorshipLawrence Livermore Laboratory (Subcontract 2069209)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS85-03443)en_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research (Grant AFOSR-85-0154)en_US
dc.description.sponsorshipNational Aeronautics and Space Administration (Grant NGL22-009-638)en_US
dc.description.sponsorshipNational Science Foundation (through KMS Fusion, Inc.)en_US
dc.description.sponsorshipU.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986en_US
dc.relation.ispartofSubmicron Structures Technology and Researchen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherSubmicron Structures Technologyen_US
dc.subject.otherSubmicron Structures Researchen_US
dc.subject.otherSubmicron Structures Laboratoryen_US
dc.subject.otherMicrofabrication at Linewidths of 0.1 μm and Belowen_US
dc.subject.otherCorrugated Gate MOS Structuresen_US
dc.subject.otherMOSFET's in Si with Deep-Submicron Channel Lengthsen_US
dc.subject.otherElectronic Conduction in Submicron Silicon Inversion Layersen_US
dc.subject.otherCrystalline Films on Amorphous Substratesen_US
dc.subject.otherSubmicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopyen_US
dc.subject.otherHigh-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopyen_US
dc.subject.otherSoft X-Ray Interferometer Gratingsen_US
dc.subject.otherSwitchable Zero Order Diffraction Grating Light Valvesen_US
dc.titleSubmicron Structures Technology and Researchen_US
dc.typeTechnical Reporten_US


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