| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Chu, William | en_US |
| dc.contributor.author | Plotnik, Irving | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Yen, Anthony T. | en_US |
| dc.contributor.author | Warren, Alan C. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Orlando, Terry P. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Chou, Stephen Y. | en_US |
| dc.contributor.author | Shahidi, Ghavam G. | en_US |
| dc.contributor.author | Licini, Jerome C. | en_US |
| dc.contributor.author | Scott-Thomas, John H. F. | en_US |
| dc.contributor.author | Park, Samuel L. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Garrison, Stephen M. | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Quek, Hui Meng | en_US |
| dc.contributor.author | Wong, Chee C. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Canizaares, Claude C. | en_US |
| dc.contributor.author | Stein, Josephine A. | en_US |
| dc.contributor.author | Summa, Deborah A. | en_US |
| dc.contributor.author | Paynter, Henry M. | en_US |
| dc.contributor.author | Rajchman, Jan A. | en_US |
| dc.contributor.author | Tse, Ming K. | en_US |
| dc.date.accessioned | 2010-07-15T22:07:01Z | |
| dc.date.available | 2010-07-15T22:07:01Z | |
| dc.date.issued | 1986-01 | en_US |
| dc.identifier | RLE_PR_128_01 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56948 | |
| dc.description | Contains reports on ten research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-83-K-0003) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAL03-86-K-0002) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS82-05701) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS85-06565) | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Subcontract 2069209) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS85-03443) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Grant AFOSR-85-0154) | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Grant NGL22-009-638) | en_US |
| dc.description.sponsorship | National Science Foundation (through KMS Fusion, Inc.) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 | en_US |
| dc.relation.ispartof | Submicron Structures Technology and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Technology | en_US |
| dc.subject.other | Submicron Structures Research | en_US |
| dc.subject.other | Submicron Structures Laboratory | en_US |
| dc.subject.other | Microfabrication at Linewidths of 0.1 μm and Below | en_US |
| dc.subject.other | Corrugated Gate MOS Structures | en_US |
| dc.subject.other | MOSFET's in Si with Deep-Submicron Channel Lengths | en_US |
| dc.subject.other | Electronic Conduction in Submicron Silicon Inversion Layers | en_US |
| dc.subject.other | Crystalline Films on Amorphous Substrates | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy | en_US |
| dc.subject.other | Soft X-Ray Interferometer Gratings | en_US |
| dc.subject.other | Switchable Zero Order Diffraction Grating Light Valves | en_US |
| dc.title | Submicron Structures Technology and Research | en_US |
| dc.type | Technical Report | en_US |
