Show simple item record

Submicron Structures Technology and Research

dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorBurkhardt, Martinen_US
dc.contributor.authorCarter, James M.en_US
dc.contributor.authorChu, Williamen_US
dc.contributor.authorEarly, Kathleen R.en_US
dc.contributor.authorGhanbari, Reza A.en_US
dc.contributor.authorKu, Yao-Chingen_US
dc.contributor.authorMoel, Alberto M.en_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorThe, Siang-Chunen_US
dc.contributor.authorYen, Anthony T.en_US
dc.contributor.authorGutierrez, JoAnne M.en_US
dc.contributor.authorLu, Kenneth P.en_US
dc.contributor.authorNg, Lee-Pengen_US
dc.contributor.authorSalyani, Shahir R.en_US
dc.contributor.authorSu, Lisa T-F.en_US
dc.contributor.authorTsai, Flora S.en_US
dc.contributor.authorWey, Leaden_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorCarlin, Gregory A.en_US
dc.contributor.authorFang, Haoen_US
dc.contributor.authorHu, Hangen_US
dc.contributor.authorField, Stuart B.en_US
dc.contributor.authorKastner, Marc A.en_US
dc.contributor.authorPark, Samuel L.en_US
dc.contributor.authorScott-Thomas, John H. F.en_US
dc.contributor.authorBagwell, Phillip F.en_US
dc.contributor.authorOrlando, Terry P.en_US
dc.contributor.authordel Alamo, Jesus A.en_US
dc.contributor.authorIsmail, Khaliden_US
dc.contributor.authorYee, Kennethen_US
dc.contributor.authorEvans, Keithen_US
dc.contributor.authorLiu, C. T.en_US
dc.contributor.authorShayegan, M.en_US
dc.contributor.authorSmith, T. P.en_US
dc.contributor.authorTsui, Danielen_US
dc.contributor.authorZhao, Yangen_US
dc.contributor.authorCanizares, Claude R.en_US
dc.contributor.authorFloro, Jerrold A.en_US
dc.contributor.authorThompson, Carl V.en_US
dc.date.accessioned2010-07-16T04:20:34Z
dc.date.available2010-07-16T04:20:34Z
dc.date.issued1990-01-01 to 1990-12-31en_US
dc.identifierRLE_PR_133_01_01s_01en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57151
dc.descriptionContains table of contents for Part I, table of contents for Section 1, description of Submicron Structures Laboratory research, reports on twelve research project and a list of publications.en_US
dc.description.sponsorshipJoint Services Electronics Program Contract DAAL03-89-C-0001en_US
dc.description.sponsorshipNational Science Foundation Grant ECS 87-09806en_US
dc.description.sponsorshipSemiconductor Research Corporation Contract 90-SP-080en_US
dc.description.sponsorshipU.S. Navy - Naval Research Laboratory Contract N00014-90-K-2018en_US
dc.description.sponsorshipNational Science Foundation Grant ECS 85-03443en_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research Grant AFOSR 88-0304en_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research Grant AFOSR 85-0154en_US
dc.description.sponsorshipX-OPT, Inc.en_US
dc.description.sponsorshipNational Aeronautics and Space Administration Contract NAS8-36748en_US
dc.description.sponsorshipAT&T Bell Laboratoriesen_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990en_US
dc.relation.ispartofSolid State Physics, Electronics and Opticsen_US
dc.relation.ispartofMaterials and Fabricationen_US
dc.relation.ispartofSubmicron Structures Technology and Researchen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherSubmicron Structures Technologyen_US
dc.subject.otherSubmicron Structures Researchen_US
dc.subject.otherSubmicron Structures Laboratoryen_US
dc.subject.otherMicrofabrication at Linewidths of 100 nm and Belowen_US
dc.subject.otherImproved Mask Technology for X-Ray Lithographyen_US
dc.subject.otherElectron Transport in Si MOSFETs with Deep-Submicron Channel Lengthsen_US
dc.subject.otherElectronic Conduction in One-Dimensional Semiconductor Devicesen_US
dc.subject.otherLateral-Surface-Superlattice in Sien_US
dc.subject.otherQuantum Wire Arrays in Sien_US
dc.subject.otherSurface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistorsen_US
dc.subject.otherOne-Dimensional Subbands in GaAs/AIGaAs Quantum Wiresen_US
dc.subject.otherMobility Modulation in GaAs/AIGaAs Quantum Wiresen_US
dc.subject.otherArrays of Field-Effect-Induced Quantum Dotsen_US
dc.subject.otherPlanar-Resonant-Tunneling Field-Effect Transistors (PRESTFET)en_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-Ray Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-Ray Interferometryen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Interferometryen_US
dc.subject.otherHigh-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopyen_US
dc.subject.otherEpitaxy via Surface-Energy-Driven Grain Growthen_US
dc.subject.otherPublicationsen_US
dc.titleSubmicron Structures Technology and Researchen_US
dc.typeTechnical Reporten_US


Files in this item

Thumbnail
Name:
RLE_PR_133_01_01s_01.pdf
Size:
12.59Mb
Format:
PDF
View/Open

This item appears in the following Collection(s)

Show simple item record