| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Etchin, Sergey | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Chu, Alex | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Haynes, Tony E. | en_US |
| dc.contributor.author | Vignaud, Dominique | en_US |
| dc.contributor.author | Kazior, Thomas E. | en_US |
| dc.contributor.author | Cobb, M. H. | en_US |
| dc.contributor.author | Armstrong, Mark A. | en_US |
| dc.contributor.author | Chiang, Tony P. | en_US |
| dc.contributor.author | Della Ratta, Anthony D. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Xu, Xin | en_US |
| dc.contributor.author | Sosonkina, Jane | en_US |
| dc.date.accessioned | 2010-07-16T05:18:05Z | |
| dc.date.available | 2010-07-16T05:18:05Z | |
| dc.date.issued | 1992-01-01 to 1992-12-31 | en_US |
| dc.identifier | RLE_PR_135_01_01s_04 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57228 | |
| dc.description | Contains an introduction, reports on x research projects and a list of publications. | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Research Office Grant DAAL-03-92-G-0217 | en_US |
| dc.description.sponsorship | National Science Foundation Grant ECS 89-21728 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Research Office (ASSERT Program) Grant DAAL03-92-G-0305 | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation | en_US |
| dc.description.sponsorship | National Science Foundation Grant DMR 92-02633 | en_US |
| dc.description.sponsorship | U.S. Army Research Office Grant DAAL03-90-G-0223 | en_US |
| dc.description.sponsorship | U.S. Navy - Naval Research Laboratory/Micrion Contract M08774 | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1992 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Focused Ion Beam Microfabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 135 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Microfabrication | en_US |
| dc.subject.other | Tunable Gunn Diodes | en_US |
| dc.subject.other | Optimization for Microwave Applications | en_US |
| dc.subject.other | Dose Rate Effects in the Implantation of Si in GaAs | en_US |
| dc.subject.other | Limited Lateral Straggle of Focused-Ion-Beam Implants | en_US |
| dc.subject.other | Focused Ion Beam Implantation in GaAs for Transistor Optimization | en_US |
| dc.subject.other | Confined Carrier Distributions in III-V Semiconductors Created by Focused Ion Beams | en_US |
| dc.subject.other | Focused Ion Beam Lithography for X-ray Mask Making | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition of Copper | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition as a Function of Angle of Ion Incidence | en_US |
| dc.subject.other | Ion Milling as a Function of Angle of Ion Incidence | en_US |
| dc.title | Focused Ion Beam Microfabrication | en_US |
| dc.type | Technical Report | en_US |
